ʻAʻole kala ʻia ka hana semiconductor i ka pololei. I ka hoʻemi ʻia ʻana o nā transistors a hoʻonui ʻia ka circuitry, hiki i nā pae liʻiliʻi o ka hoʻololi ʻana i ke kaiapuni ke hopena i nā hemahema, hāʻule hāʻawi, a i ʻole ka pau ʻole o ka hilinaʻi. ʻO ke kānalua ʻole, ʻo ka mea nui a mālama ʻole ʻia o kahi kaʻina hana kīnā ʻole ʻo ia ka mālama haʻahaʻa. ʻAʻole i hoʻokumu ʻia ka hana kiʻekiʻe ma luna o nā lako lumi semiconductor maʻemaʻe hou, akā ma nā hana hoʻomaʻemaʻe semiconductor cleanroom dehumidification i hoʻomaʻemaʻe ʻia me nā ʻāpana kaʻina kikoʻī.

ʻO ke kuleana o ka humidity i ka hana semiconductor

ʻAʻole ʻoluʻolu wale ka haʻahaʻa—he mea nui ia i nā hale hana semiconductor. ʻO ka haʻahaʻa haʻahaʻa ʻole e loaʻa i nā pōʻino penei:

• Oxidation o na ili wafer ko'iko'i
• Electrostatic discharge (ESD), ʻoi aku ka haʻahaʻa haʻahaʻa
• ʻO ka hoʻohaumia ʻana o ka ʻāpana ma o ka hoʻopili ʻana i ka mahu wai
• ʻO ka corrosion i hoʻokumu ʻia e ka makū i ka wā o ka hoʻopili ʻana a me nā pae hoʻāʻo

No ka mea ua hana ʻia nā mea semiconductor ma nā unahi nanometer i kēia lā, ua hoʻonui ʻia kēia mau pilikia. No laila, ʻaʻole he manaʻo maikaʻi wale ka mana semiconductor humidity - he mea pono ʻenehana.

E hoʻomaopopo i ka lumi hoʻomaʻemaʻe Semiconductor

Kūkulu ʻia nā hale hana semiconductor, a i ʻole nā ​​​​fabs, me nā pae haʻahaʻa haʻahaʻa haʻahaʻa o ka ea, ka piʻi ʻana o ka mahana, a me ka haʻahaʻa. Hoʻokaʻawale ʻia nā lumi hoʻomaʻemaʻe ma ke ʻano o ka helu ʻae ʻia a me ke anawaena o nā ʻāpana i kēlā me kēia mika cubic e like me ka ISO a i ʻole Federal Standard 209E classification.

I kēia kaiapuni, ʻaʻole hoʻoponopono wale nā ​​lako lumi semiconductor i ka ea a me ka kānana akā hoʻopaʻa i ka mahana a me ka haʻahaʻa. ʻO ka hoʻohui ʻana o nā ʻōnaehana lumi maʻemaʻe pono e hōʻoia i ka hui ʻana o nā ʻāpana kaiapuni. He ʻoiaʻiʻo kēia i nā hana maʻalahi e like me ka lithography, chemical vapor deposition (CVD), a me ka etching.

ʻO nā lako lumi hoʻomaʻemaʻe Semiconductor koʻikoʻi no ka mālama ʻana i ke kaiapuni

Hoʻohana nā mea hana hou i nā mea hana like ʻole me ka hana kiʻekiʻe e nānā i nā kūlana kaiapuni. I ka hoʻomaʻemaʻe ʻana i ka ea a me ka mālama ʻana i ka haʻahaʻa, ʻo nā mea hana ma lalo nei ka mea nui:

• Nā kānana HEPA a me ULPA: Wehe i nā ʻāpana ea e like me ka liʻiliʻi e like me ka 0.12 microns, e ʻōlelo ana i ka hoʻomaʻemaʻe ʻana o ka ea a me ka hoʻomalu ʻana i ka haʻahaʻa ma o ka hōʻoia ʻana i nā ʻano hoʻoheheʻe ea.
• Nā Pūnaehana HVAC lumi hoʻomaʻemaʻe: Hoʻonohonoho pono ʻia nā ʻōnaehana hoʻomehana kūikawā, hoʻoheheʻe ʻana, a me nā ʻōnaehana ea i kēlā me kēia wahi o ka lumi maʻemaʻe.
• Nā Pūnaehana Nānā Kaiapuni: E kiaʻi mau no ka haʻahaʻa, ka mahana, a me nā ʻāpana ea, e hāʻawi ana i ka ʻōlelo aʻo manawa maoli a me ka hoʻopaʻa inoa ʻikepili.
• Nā ʻāpana Dehumidification: Hoʻohui ʻia i loko o nā ʻōnaehana HVAC i ka hapa nui o nā manawa, ʻo ia nā mea hoʻokele koʻikoʻi i ka loaʻa ʻana o nā wahi hau haʻahaʻa haʻahaʻa i nā ʻāpana kiʻekiʻe.

Pono e hoʻolālā ʻia nā mea hana a pau no ka lumi hoʻomaʻemaʻe semiconductor me ka mālama haʻahaʻa, kūpono, a me ka hilinaʻi e hōʻoia i ka manawa o ka hana a me ke kūpaʻa.

Nā ʻenehana hoʻomaʻemaʻe semiconductor kiʻekiʻe

ʻO ka hoʻoponopono ʻana i ka haʻahaʻa maikaʻi loa i nā lumi semiconductor maʻemaʻe he paʻakikī ʻenehana, ʻoi aku ka nui i ka wā kiʻekiʻe a haʻahaʻa loa ka hau hau, e koi ana i nā mea kanu (e like me -40°C a i ʻole -60°C). ʻO ia kahi e komo ai ka ʻenehana dehumidification semiconductor cleanroom.

Hoʻohana ʻia nā ʻenehana dehumidification:

• Desiccant Dehumidifiers: Hoʻohana kēia i nā mea hygroscopic e hoʻomaloʻo i ka ea a kūpono no nā noi haʻahaʻa-RH.
• Nā Dehumidifiers Hoʻokumu ʻia i ka Refrigeration: Hoʻomaʻalili lākou i ka ea no ka lawe ʻana i ka wai, ʻoi aku ka maikaʻi no nā pae maʻamau o nā koi hoʻomalu haʻahaʻa.
• Nā Pūnaehana Hybrid: Hoʻohui ʻia ka Desiccant a me ka refrigeration no ka hana pono ma lalo o nā kūlana mana koʻikoʻi.

Hoʻokumu pinepine ʻia nā ʻōnaehana me ka hiki ke zoning, kahi e loaʻa ai i nā ʻāpana pākahi o ka lumi maʻemaʻe nā pae haʻahaʻa like ʻole e like me ke kaʻina hana a me ka ʻike o nā mea hana.

Nā Pōmaikaʻi o Integrated Semiconductor Humidity Control

ʻO kahi ʻano hana hoʻomalu semiconductor humidity i hoʻohui ʻia he mau pono hana:

• Hoʻomaikaʻi ʻia ka hua: ʻO ka haʻahaʻa haʻahaʻa e pale i nā hemahema o ka makū a hāʻawi i kahi ratio kiʻekiʻe o nā chips hoʻohana.
• Hoʻemi ʻia ka manawa hoʻohaʻahaʻa: ʻO nā ʻōnaehana hoʻokele kaiapuni ʻokoʻa e hōʻemi i ka fiddling manual a me ka debugging i kahi palena liʻiliʻi.
• Ka hoʻokō a me ka hōʻoia ʻana: ʻoi aku ka maʻalahi o ka hoʻokō me ISO 14644 a i ʻole GMP hōʻoia me nā ʻōnaehana mana maikaʻi i ka hana.
• ʻO ka ikaika o ka ikehu: Hiki i nā ʻōnaehana dehumidification kiʻekiʻe ke ikaika i ka ikehu akā mālama ʻia i loko o nā palena paʻa.

Eia kekahi, me ka hana ʻana o nā fabs a me ka AI-driven, ua hoʻohui ʻia nā ʻōnaehana hoʻomalu humidity i nā ʻōnaehana ʻē aʻe, e like me nā ʻōnaehana hoʻokō hana (MES) a me nā ʻōnaehana hoʻokele hale (BMS), e hoʻomalu pono ʻia a me ka wānana-mālama-hiki.

Ka hopena

ʻO ka mālama ʻana i ka haʻahaʻa i loko o ka hana semiconductor ʻaʻole i emi iho ma mua o kahi hopohopo lua - he mea hoʻoikaika i ka maikaʻi, kūlike, a me ka loaʻa kālā. Ke hoʻohana nei i ka ʻenehana lumi hoʻomaʻemaʻe semiconductor kiʻekiʻe a me nā ʻano hoʻomaʻemaʻe semiconductor cleanroom kūpono, hiki i nā fabs ke hoʻokō i nā ʻae kūpono e pono ai ke hana ʻana i nā ʻāpana o ka hanauna e hiki mai ana.

Ma ka hoʻopili ʻana i nā ʻōnaehana semiconductor humidity i hoʻohui ʻia, naʻauao, a mālama i ka mana, hoʻonoho ʻoe iā ʻoe iho i kahi kūlana e hoʻokō i nā koi hoʻonui o nā mākeke mai AI a me IoT i ka automotive a me ka aerospace. Ma kahi honua kahi mea koʻikoʻi hoʻokahi micron, ʻoi aku ka koʻikoʻi o ke kaiapuni āu e hana ai.