Kev tsim khoom semiconductor tsis zam txim rau qhov raug. Raws li cov transistors raug txo qis thiab circuitry tau nce, txawm tias qhov tsawg kawg nkaus ntawm ib puag ncig kev hloov pauv tuaj yeem ua rau muaj qhov tsis xws luag, tawm los poob, lossis kev ntseeg siab kawg. Undoubtedly, qhov tseem ceeb tshaj plaws thiab tsis saib xyuas ntawm cov txheej txheem tsis muaj qhov tsis xws luag yog kev tswj cov av noo. Peak kev ua tau zoo tsis yog tsuas yog tsim los ntawm cov khoom siv hluav taws xob semiconductor cleanroom, tab sis ntawm semiconductor cleanroom dehumidification kev coj ua kom zoo zoo nrog cov txheej txheem tshwj xeeb hauv kev tsom.

Lub luag haujlwm ntawm Humidity hauv Semiconductor Manufacturing

Cov av noo tsis yog ib qho khoom kim heev - nws yog ib qho tseem ceeb hauv cov chaw tsim khoom semiconductor. Uncontrolled humidity ua rau muaj kev phom sij hauv qab no:

• Oxidation ntawm rhiab wafer nto
• Electrostatic paug (ESD), tshwj xeeb tshaj yog nyob rau hauv cov av qis
• Particle contamination ntawm dej vapor txuas
• Corrosion tshwm sim los ntawm cov dej noo thaum lub sij hawm ntim khoom thiab kuaj theem

Txij li cov khoom siv semiconductor yog tsim los ntawm nanometer nplai niaj hnub no, cov kev pheej hmoo no tau nce ntxiv. Yog li, semiconductor humidity tswj tsis yog tsuas yog ib lub tswv yim zoo - nws yog ib qho tseem ceeb ntawm kev ua haujlwm.

Nkag siab Semiconductor Cleanroom

Semiconductor manufacturing factories, los yog fabs, yog tsim los nrog cov huab cua tsawg heev, qhov kub hloov pauv, thiab av noo. Cov chav huv huv raug cais raws li tus naj npawb uas tau txais thiab txoj kab uas hla ntawm cov khoom ib lub cubic meter raws li ISO lossis Federal Standard 209E kev faib tawm.

Nyob rau hauv ib puag ncig no, cov khoom siv semiconductor cleanroom tsis tsuas yog tswj cov huab cua thiab pom, tab sis kuj stabilizes kub thiab av noo. Kev sib koom ua ke ntawm chav huv huv yuav tsum xyuas kom meej tias ib puag ncig tsis sib haum xeeb. Qhov no yog qhov tseeb tshwj xeeb hauv kev ua haujlwm me me xws li lithography, tshuaj vapor deposition (CVD), thiab etching.

Critical Semiconductor Cleanroom Equipment for Environmental Control

Niaj hnub nimno fabs siv ntau yam khoom siv nrog kev ua haujlwm siab los saib xyuas ib puag ncig. Hauv kev tswj huab cua huv thiab av noo, cov cuab yeej hauv qab no yog qhov tseem ceeb tshaj plaws:

• HEPA thiab ULPA Lim: Tshem tawm cov huab cua me me li 0.12 microns, hais txog huab cua huv thiab tswj cov av noo los ntawm kev ua kom cov qauv huab cua ruaj khov.
• Cleanroom HVAC Systems: Cov cua sov tshwj xeeb, qhov cua, thiab cov cua txias tshwj xeeb yog tsim tshwj xeeb rau ib qho chaw ntawm chav huv.
• Environmental Monitoring Systems: Puas tau saib xyuas cov av noo, qhov kub thiab txias, thiab cov khoom siv hauv huab cua, muab cov lus ceeb toom ntawm lub sijhawm thiab cov ntaub ntawv kaw.
• Dehumidification Units: Muab tso rau hauv HVAC systems nyob rau hauv feem ntau, cov no yog cov tseem ceeb tsav tsheb mus rau lub attainment ntawm ultra-low dew ntsiab lus nyob rau hauv high-rhiab heev cheeb tsam.

Tag nrho cov khoom siv rau lub semiconductor cleanroom yuav tsum tau tsim nrog kev saib xyuas qis, kev sib raug zoo, thiab kev ntseeg siab kom ntseeg tau tias lub sijhawm ua haujlwm thiab kev ruaj ntseg.

Advanced Semiconductor Cleanroom Dehumidification Techniques

Kev tswj cov av noo zoo hauv cov chav tsev semiconductor yog qhov kev sib tw thev naus laus zis, tshwj xeeb tshaj yog thaum cov av noo ib puag ncig siab lossis qis qis qis, xav tau cov nroj tsuag (tsawg li -40 ° C lossis txawm -60 ° C). Qhov ntawd yog qhov twg semiconductor cleanroom dehumidification technology nqis hauv.

Cov txheej txheem dehumidification ua haujlwm yog:

• Desiccant Dehumidifiers: Cov no siv cov khoom siv hygroscopic kom desiccate huab cua thiab zoo tagnrho rau kev siv qis-RH.
• Refrigeration-Based Dehumidifiers: Lawv txias huab cua los thauj dej, zoo rau cov theem ntawm cov av noo tswj kev xav tau.
• Hybrid Systems: Desiccant thiab tub yees yog sib xyaw kom muaj txiaj ntsig zoo hauv kev tswj xyuas nruj.

Cov tshuab feem ntau yog tsim los nrog kev muaj peev xwm zoning, qhov twg cov cheeb tsam ntawm chav huv yuav muaj cov av sib txawv raws li cov txheej txheem theem thiab cov cuab yeej rhiab heev.

Qhov zoo ntawm Integrated Semiconductor Humidity Control

Ib qho kev sib xyaw semiconductor humidity tswj txoj kev muaj ntau yam kev ua haujlwm zoo:

• Txhim Kho Cov Yield: Cov av noo tsis tu ncua tiv thaiv cov dej noo tsis xws luag thiab muab ntau dua ntawm cov chips siv tau.
• Txo Lub Sijhawm Ua Haujlwm: Kev tswj hwm ib puag ncig ib puag ncig txo qis phau ntawv fiddling thiab debugging kom tsawg kawg nkaus.
• Kev ua raws cai thiab ntawv pov thawj: Kev ua raws li ISO 14644 lossis GMP daim ntawv pov thawj yuav yooj yim dua nrog cov kev tswj hwm zoo hauv kev ua haujlwm.
• Zog Efficiency: Cov txheej txheem dehumidification Advanced tuaj yeem ua kom muaj zog tsis tau tswj kom tsis pub dhau qhov txwv nruj.

Tsis tas li ntawd, nrog cov fabs tau ua haujlwm tsis siv neeg thiab AI-tsav, cov av noo tswj cov tshuab tau muab tso rau hauv lwm lub tshuab, xws li kev tsim cov tshuab ua haujlwm (MES) thiab lub tsev tswj kev tswj hwm (BMS), yuav tsum tau tswj hwm hauv nruab nrab thiab kev kwv yees-kev saib xyuas-muaj peev xwm.

Xaus

Kev tswj cov av noo thoob plaws hauv kev tsim khoom semiconductor tsis yog tsawg dua qhov kev txhawj xeeb thib ob - nws yog qhov ua kom muaj txiaj ntsig zoo, sib xws, thiab muaj txiaj ntsig. Siv cov thev naus laus zis semiconductor cleanroom technology thiab tsim nyog semiconductor cleanroom dehumidification txoj kev, fabs tuaj yeem ua tau raws li qhov yuav tsum tau ua los tsim cov chips tiam tom ntej.

Los ntawm kev koom ua ke, txawj ntse, thiab txuag hluav taws xob semiconductor humidity tswj tshuab, koj tso koj tus kheej hauv txoj haujlwm kom tau raws li kev xav tau ntawm kev lag luam xws li AI thiab IoT mus rau tsheb thiab aerospace. Hauv lub ntiaj teb uas ib micron tseem ceeb heev, ib puag ncig koj tsim yog qhov tseem ceeb dua.