He uaua te hanga i ngā hiko haurua-whakawhiti i roto i te tika. I te whakaitihia o ngā transistors me te whakanui ake i ngā ara iahiko, ahakoa he iti noa ngā rerekētanga taiao ka hua ake he hapa, he ngaronga hua, he rahunga rānei o te pono whakamutunga. Kāore e kore, ko te āhuatanga tino nui me te kore e arohia o te tukanga kore-hapa ko te whakahaere i te haumākū. Kāore te mahi tino pai e ahu mai ana i ngā taputapu rūma horoi haurua-whakawhiti hou anake, engari i runga i ngā mahi whakamaroke rūma horoi haurua-whakawhiti kua whakatikatikaina me ngā tawhā tukanga motuhake e arotahi ana.

Te Tūranga o te Makuku i roto i te Hanganga Ārahi-Haumaru

Ehara i te mea he taonga noa iho te haumākū—he mea nui hoki i roto i ngā whare hanga haurua-ā-rangi. Ka puta ngā tūponotanga kino e whai ake nei mēnā kāore e whakahaeretia te haumākū:

• Te waikura o ngā mata wafer tairongo
• Te tukunga hiko pūmau (ESD), inā koa i roto i ngā āhuatanga haumākū iti
• Te poke o ngā matūriki mā te piri o te kohu wai
• Te waikura i puta mai i te makuku i ngā wā o te takai me te whakamātautau

Nā te mea kei te hangaia ngā taputapu haurua-ira i ngā tauine nanometer i ēnei rā, kua piki ake ēnei mōrearea. Nō reira, ehara i te mea he whakaaro pai noa iho te whakahaere i te haumākū o ngā haurua-ira—he mea hangarau nui anō hoki.

Mārama ki te Semiconductor Cleanroom

Ko ngā wheketere hanga hiko haurua, arā, ngā wheketere hanga hiko, he tino iti ngā taumata matūriki e rere ana i te hau, te piki me te heke o te pāmahana, me te haumākū. Ka whakarōpūtia ngā rūma ma i runga i te maha me te diameter e whakaaetia ana o ngā matūriki mō ia mita pūtoru e ai ki te whakarōpūtanga ISO, Federal Standard 209E rānei.

I tēnei taiao, ehara i te mea ka whakahaere noa ngā taputapu rūma horoi haurua-haurua i te rere o te hau me te tātari engari ka whakaū hoki i te pāmahana me te haumākū. Me whakarite te whakaurunga o ngā pūnaha rūma horoi kia ōrite ngā tawhā taiao. He pono rawa tēnei i roto i ngā mahi uaua pēnei i te tuhi whakaahua, te whakatakoto kohu matū (CVD), me te whakairo.

Ngā Taputapu Horoi Rūma Ma o te Semiconductor mō te Whakahaere Taiao

He maha ngā taputapu mahi-teitei e whakamahia ana e ngā whare hanga hou hei aroturuki i ngā āhuatanga o te taiao. Mō te whakahaere i te ma o te hau me te haumākū, ko ngā taputapu e whai ake nei te mea nui rawa atu:

• Ngā Tātari HEPA me te ULPA: Tangohia ngā matūriki hau he iti noa iho i te 0.12 maikorona, me te aro ki te horoi o te hau me te whakahaere i te makuku mā te whakarite kia pumau ngā tauira rere hau.
• Ngā Pūnaha HVAC Rūma Ma: Ko ngā pūnaha whakamahana, whakapūhautanga, me te hauhautanga motuhake kua whakaritea mō ngā wāhanga takitahi o te rūma ma.
• Ngā Pūnaha Aroturuki Taiao: Kia mataara tonu ki te haumākū, te pāmahana, me ngā matūriki hau, e tuku ana i te whakatūpato wā-tūturu me te takiuru raraunga.
• Ngā Wāhanga Whakamaroke: Ina whakauruhia ki roto i ngā pūnaha HVAC i te nuinga o te wā, koinei ngā mea matua hei whakatutuki i ngā pūwāhi tomairangi tino iti i ngā rohe tairongo nui.

Me hoahoa ngā taputapu katoa mō te rūma ma o te haurua-ira kia iti te tiaki, kia hototahi, kia pono hoki, kia roa ai te mahi me te pumau o ngā tukanga.

Ngā Tikanga Whakamaroke Rūma Ma o te Semiconductor Matatau

He wero hangarau te whakahaere i te haumākū tino pai i roto i ngā rūma ma o ngā mīhini haurua-ira, inā koa he teitei, he iti rawa rānei te tomairangi o te taiao, e hiahiatia ana ngā tipu (tae atu ki te -40°C, tae atu rānei ki te -60°C). Koinei te wāhi e whai wāhi mai ai te hangarau whakamaroke i te haumākū o ngā mīhini haurua-ira.

Ko ngā tikanga whakamaroke e whakamahia ana ko:

• Ngā Whakamaroke Haumākū: Ka whakamahia e ēnei he rauemi waikore hei whakamaroke i te hau, ā, he mea tino pai mō ngā tono RH-iti.
• Ngā Whakamaroke Haumākū e Hangai Ana ki te Pouaka Whakamatao: Ka whakamatao i te hau hei kawe i te wai, he mea tino pai mō ngā taumata whānui o te whakahaere i te haumākū.
• Ngā Pūnaha Ranu: Ka whakaranua te whakamaroke me te pouaka whakamātao mō te mahi whai hua i raro i ngā tikanga whakahaere tino pakari.

He maha ngā wā ka hangaia ngā pūnaha me te āheinga whakarōpū, ka rerekē pea ngā taumata makuku o ia rohe o te rūma ma i runga i te wāhanga tukanga me te aro o ngā taputapu.

Ngā Painga o te Whakahaere Makuku Whakakotahi o te Kaiwhakahaere Haumākū

He maha ngā painga o te tikanga whakahaere haumākū whakauru o te haurua-haurua:

• Huanga Whakapai Ake: Mā te haumākū pumau ka ārai i ngā hapa o te makuku, ā, ka nui ake te ōwehenga o ngā maramara ka taea te whakamahi.
• Te Whakaiti i te Wā Whakamutu: Ka whakaitihia e ngā pūnaha whakahaere taiao aunoa te mahi wiri ā-ringa me te patuiro ki te iti rawa.
• Te Whakatutukitanga me te Tiwhikete: Ka māmā ake te whakatutukitanga i ngā whakaritenga ISO 14644, GMP rānei, mā te whakamahi i ngā pūnaha whakahaere tino pai.
• Whai Huatanga Pūngao: Ka taea e ngā pūnaha whakamaroke haumākū matatau te whai hua i te pūngao engari ka taea te whakahaere i roto i ngā rohe kuiti.

Hei tāpiritanga, nā te mea kua aunoatia ngā whare hanga me te whakahaeretia e te AI, kei te whakauruhia ngā pūnaha whakahaere makuku ki roto i ētahi atu pūnaha, pērā i ngā pūnaha whakahaere hanga (MES) me ngā pūnaha whakahaere whare (BMS), kia whakahaerehia ā-pokapū, kia taea ai te tiaki matapae.

Whakamutunga

Ko te whakahaere i te haumākū puta noa i te hangahanga haurua-waenga he mea tuarua tēnei—he mea e āhei ai te kounga, te ōritetanga, me te hua. Mā te whakamahi i te hangarau rūma horoi haurua-waenga matatau me ngā tikanga whakamaroke rūma horoi haurua-waenga e tika ana, ka taea e ngā kamupene hanga te whakatutuki i ngā manawanui tika e hiahiatia ana hei hanga maramara o te whakatupuranga e whai ake nei.

Mā te awhi i ngā pūnaha whakahaere haumākū haurua-haurua kua whakauruhia, he atamai, he penapena hiko hoki, ka whakanohoia koe ki tētahi tūranga hei whakatutuki i ngā tono e tipu haere ana o ngā mākete mai i te AI me te IoT ki ngā motuka me te rererangi. I roto i tētahi ao e hira ana te kotahi maikorona, he mea nui ake te taiao e waihangahia ana e koe.