Semiconductor kugadzira hakuregereri mukururama. Sezvo ma transistors akadzikiswa uye kutenderera kunowedzera, kunyangwe mazinga mashoma ekusiyana kwezvakatipoteredza anogona kukonzera kuremara, kurasikirwa negoho, kana kutadza kuvimbika kwekupedzisira. Pasina mubvunzo, iyo inonyanya kukosha uye inoregeredzwa yemaitiro-isina chikanganiso kudzora humidity. Peak performance haina kuvakirwa chete pane-ye-the-art semiconductor yekuchenesa midziyo yekamuri, asi pane semiconductor yekuchenesa imba yekubvisa humidification maitiro anonatswa nehana ine chaiwo maitiro maparamita mukutarisa.

Basa reHumidity muSemiconductor Manufacturing

Humidity haisi yekungogara chete - chinhu chakakosha muzvivakwa zvekugadzira semiconductor. Hunyoro husingadzoreki hunounza njodzi dzinotevera:

• Oxidation yenzvimbo dzakasimba dzakapfava
• Electrostatic discharge (ESD), kunyanya mumamiriro epasi-munyoro
• Particle kusvibiswa kuburikidza nemvura vapor attachment
• Corrosion inokonzerwa nehunyoro panguva yekurongedza uye matanho ekuyedza

Sezvo michina ye semiconductor ichigadzirwa pazvikero zve nanometer nhasi, njodzi idzi dzinowedzerwa. Saka, semiconductor humidity control haingori pfungwa yakanaka - inyanzvi yehunyanzvi.

Nzwisisa Semiconductor Cleanroom

Semiconductor mafekitori ekugadzira, kana machira, anovakwa ane akanyanya kuderera mhepo particle mazinga, tembiricha kushanduka, uye humidity. Dzimba dzekuchenesa dzakaiswa maererano nehuwandu hunogamuchirwa uye dhayamita yezvikamu pa cubic mita zvichienderana neISO kana Federal Standard 209E classification.

Munzvimbo ino, semiconductor yekuchenesa midziyo haingodzore kuyerera kwemhepo uye kusefa asiwo inodzikamisa tembiricha uye hunyoro. Iko kubatanidzwa kwemasisitimu ekuchenesa kunofanirwa kuve nechokwadi chekuti maparamendi ezvakatipoteredza anowirirana. Izvi zvinonyanya kuitika mukushanda kwakapfava senge lithography, kemikari vapor deposition (CVD), uye etching.

Critical Semiconductor Cleanroom Equipment for Environmental Control

Micheka yemazuva ano inoshandisa michina yakasiyana-siyana ine kushanda kwepamusoro kutarisa mamiriro ezvakatipoteredza. Muhutsanana hwemhepo uye humidity control, zvinotevera midziyo inonyanya kukosha:

• HEPA uye ULPA Mafirita: Bvisa zvimedu zvemhepo zvidiki se 0.12 microns, kugadzirisa hutsanana hwemhepo uye humidity control nekuona yakagadzikana mafambiro emhepo.
• Cleanroom HVAC Systems: Yakasarudzika yekudziya, kufefetedza, uye air-conditioning masisitimu akanyatso kurongedzerwa kune yega nzvimbo dzeimba yekuchenesa.
• Environmental Monitoring Systems: Gara wakatarisa kunyorova, tembiricha, uye nemhepo zvikamu, zvichipa chaiyo-nguva yambiro uye kutema data.
• Dehumidification Units: Yakabatanidzwa muHVAC masisitimu muzviitiko zvakawanda, aya ndiwo madhiraivha akakosha kusvika pakuwanikwa kwedova repamusoro-soro munzvimbo dzakanyanya-kunzwa.

Yese midziyo ye semiconductor yekuchenesa imba inofanirwa kugadzirwa ine yakaderera kugadzirisa, kuenderana, uye kuvimbika kuve nechokwadi chekukwira uye kugadzirisa kugadzikana.

Yepamberi Semiconductor Yekuchenesa mukamuri Dehumidification Techniques

Kunyatsogadzirisa humidity regulation mu semiconductor cleanrooms idambudziko retekinoroji, kunyanya kana hunyoro hwemukati hwakakwira kana hushoma hwedova, zvinoda zvirimwa (zvakadzika se -40°C kana -60°C). Ndipo panopinda semiconductor cleanroom dehumidification tekinoroji.

Dehumidification maitiro anoshandiswa ndeaya:

• Desiccant Dehumidifiers: Aya anoshandisa hygroscopic zvinhu kuti desiccate mweya uye akanakira yakaderera-RH application.
• Refrigeration-Yakavakirwa Dehumidifiers: Vanotonhorera mweya kutakura mvura, yakaringana kune akajairwa mazinga ehumidity control zvinodiwa.
• Hybrid Systems: Desiccant uye firiji inosanganiswa kuti iite basa rinoshanda pasi pemamiriro akasimba ekudzora.

Iwo masisitimu anowanzo kuvakwa ane zoning kugona, uko nzvimbo dzega dzemuimba yekuchenesa dzinogona kunge dziine hunyoro hwakasiyana hunoenderana nedanho rekuita uye kunzwira kwemidziyo.

Zvakanakira zveIntegrated Semiconductor Humidity Control

Iyo yakabatanidzwa semiconductor humidity control nzira ine akati wandei mabhenefiti ekushandisa:

• Goho Rakavandudzwa: Hunyoro hunoenderana hunodzivirira hunyoro hunokanganisa uye hunopa huwandu hwepamusoro hwemachipisi anogona kushandiswa.
• Yakaderedzwa Downtime: Otomatiki kudzora kwezvakatipoteredza masisitimu anoderedza manyorero fiddling uye debugging kusvika paudiki hwakakwana.
• Kuteerera uye Chitupa: Kuenderana neISO 14644 kana GMP certification inova nyore neakanakisa ekudzora masisitimu ari kushanda.
• Kubudirira Kwesimba: Yepamberi dehumidification masisitimu anogona kuita simba-rinoshanda asi achidzorwa mukati memiganhu yakaoma.

Pamusoro pezvo, nemachira ari otomatiki uye anotyairwa neAI, masisitimu ekudzora humidity ari kubatanidzwa mune mamwe masisitimu, senge kugadzira execution masisitimu (MES) uye kuvaka manejimendi masisitimu (BMS), kuve akadzorwa nepakati uye kufungidzira-kuchengetedza-kukwanisa.

Mhedziso

Kudzora humidity mukati mekugadzira semiconductor haisi pasi pechinhu chechipiri-inogonesa yemukati yemhando, kuwirirana, uye pundutso. Uchishandisa advanced semiconductor cleanroom tekinoroji uye yakakodzera semiconductor cleanroom dehumidification nzira, machira anogona kuwana chaiwo kushivirira kunodiwa kugadzira inotevera-chizvarwa machipisi.

Nekumbundira masisitimu akabatanidzwa, akangwara, uye ekuchengetedza simba semiconductor humidity control, unozviisa pachinzvimbo chekusangana nekuwedzera kuri kuda kwemisika kubva kuAI neIoT kuenda kumotokari uye mhepo. Munyika umo micron imwe yakakosha, nharaunda yaunogadzira inotonyanya kukosha.