Gukora Semiconductor ntibibabarira mubyukuri. Nkuko tristoriste yagabanutse kandi umuzunguruko ukaba wiyongereye, niyo urwego ruto rwo guhindura ibidukikije rushobora kuvamo inenge, gutakaza umusaruro, cyangwa kunanirwa kwizerwa kwa nyuma. Nta gushidikanya, ikintu cyingenzi kandi cyirengagijwe muburyo butarangwamo inenge ni ukugenzura ubushuhe. Imikorere ya mpinga ntabwo ishingiye gusa ku bikoresho bigezweho byo mu isuku ya semiconductor, ahubwo ishingiye ku bikorwa byo gusukura igice cya semiconductor isuku yanduye itabishaka hamwe n’ibipimo byihariye byibandwaho.

Uruhare rw'ubushuhe mu gukora Semiconductor

Ubushuhe ntabwo ari ibintu byiza gusa - ni ikintu cyingenzi mubikorwa byo gukora igice cya kabiri. Ubushuhe butagenzuwe butera ingaruka zikurikira:

• Oxidation yimiterere ya wafer igaragara
• Gusohora amashanyarazi (ESD), cyane cyane mubihe by'ubushyuhe buke
• Umwanda wanduye ukoresheje umugozi wamazi
• Ruswa iterwa nubushuhe mugihe cyo gupakira no gupima

Kubera ko ibikoresho bya semiconductor bikorerwa ku munzani wa nanometero uyumunsi, izi ngaruka ziriyongera. Kugenzura ubuhehere bwa semiconductor ntabwo ari igitekerezo cyiza-ni itegeko rya tekiniki.

Sobanukirwa Isuku ya Semiconductor

Inganda zikora Semiconductor, cyangwa fabs, zubatswe hamwe nuduce duto cyane two mu kirere, ihindagurika ryubushyuhe, nubushuhe. Ubwiherero bushyirwa mubikorwa ukurikije umubare wemewe na diameter ya buke kuri metero kibe ukurikije ISO cyangwa Federal Standard 209E.

Muri ibi bidukikije, ibikoresho byogukora isuku ya semiconductor ntabwo bigenga gusa umwuka no kuyungurura ahubwo binagabanya ubushyuhe nubushuhe. Kwishyira hamwe kwa sisitemu yubwiherero bigomba kwemeza ko ibipimo byibidukikije bihujwe. Ibi ni ukuri cyane cyane mubikorwa byoroshye nka lithographie, kubika imyuka ya chimique (CVD), hamwe nibindi.

Ibikoresho byingenzi bya Semiconductor ibikoresho byogusukura ibidukikije

Fabs zigezweho zikoresha ibikoresho bitandukanye bifite imikorere ihanitse kugirango ikurikirane ibidukikije. Mu isuku y’ikirere no kugenzura ubushuhe, ibikoresho bikurikira ni ngombwa cyane:

• Akayunguruzo ka HEPA na ULPA: Kuraho uduce duto two mu kirere duto nka microne 0,12, bikemura ikibazo cy’isuku ry’ikirere no kugenzura ubushuhe kugira ngo habeho uburyo bwo guhumeka neza.
• Sisitemu yisuku ya HVAC: Sisitemu yihariye yo gushyushya, guhumeka, hamwe nubushyuhe bwo guhumeka bihujwe cyane cyane mubice byubwiherero.
• Sisitemu yo gukurikirana ibidukikije: Buri gihe ujye ureba neza ubushuhe, ubushyuhe, hamwe nuduce twinshi two mu kirere, bitanga umuburo wigihe kandi wandika amakuru.
• Ibice bya Dehumidification: Byinjijwe muri sisitemu ya HVAC mubihe byinshi, izi nizo ntambwe zingenzi ziganisha ku kugera ku manota y’ikime ya ultra-hasi mu turere twinshi cyane.

Ibikoresho byose byogukora isuku ya semiconductor bigomba kuba byateguwe hamwe no kubungabunga bike, guhuza, no kwizerwa kugirango habeho igihe no gutuza neza.

Ubuhanga buhanitse bwa Semiconductor Isuku ya Dehumidification

Amabwiriza meza yubushuhe mu bwiherero bwa semiconductor ni ikibazo cyikoranabuhanga, cyane cyane iyo ibidukikije by’ibidukikije biri hejuru cyane cyangwa ikime gito cyane, gisaba ibimera (munsi ya -40 ° C cyangwa na -60 ° C). Aho niho semiconductor isuku yubwiherero bwa dehumidification ikora.

Uburyo bwa Dehumidification bukoreshwa ni:

• Desiccant Dehumidifiers: Ibi bikoresha ibikoresho bya hygroscopique kugirango byanduze umwuka kandi nibyiza kubisabwa bike-RH.
• Dehumidifiers ishingiye kuri firigo: Bakonje umwuka wo gutwara amazi, nibyiza kurwego rusange rusabwa rwo kugenzura ubushuhe.
• Sisitemu ya Hybrid: Desiccant na firigo byahujwe kugirango bikore neza mugihe gikwiye.

Sisitemu ikunze kubakwa ifite ubushobozi bwo gutondekanya uturere, aho uturere tumwe na tumwe twi suku dushobora kugira ubushyuhe butandukanye ukurikije ibyakozwe hamwe nubushobozi bwibikoresho.

Ibyiza bya Semiconductor Yuzuye Igenzura

Uburyo bukomatanyije bwa semiconductor bugenzura uburyo bwiza bwo gukora:

• Umusaruro unoze: Ubushuhe buhoraho burinda ubusembwa kandi butanga igipimo kinini cya chip ikoreshwa.
• Kugabanya Isaha: Sisitemu yo kugenzura ibidukikije yikora igabanya kugendana intoki no gukemura kugeza byibuze.
• Kubahiriza no Kwemeza: Guhuza na ISO 14644 cyangwa icyemezo cya GMP biba byoroshye hamwe na sisitemu nziza yo kugenzura ikora.
• Ingufu zingirakamaro: Sisitemu yohanze ya dehumidifike irashobora gukoresha ingufu nyamara igenzurwa mugihe gito.

Byongeye kandi, hamwe na fabs zikoreshwa kandi zikoreshwa na AI, sisitemu yo kugenzura ubuhehere irimo kwinjizwa mubindi bikoresho, nka sisitemu yo gukora ibicuruzwa (MES) hamwe na sisitemu yo gucunga inyubako (BMS), kugirango igenzurwe hagati kandi ibe ishobora-guteganya-ubushobozi.

Umwanzuro

Kugenzura ubuhehere mu bice byose bya semiconductor ntabwo biri munsi yikibazo cya kabiri - ni ikintu gifasha ubuziranenge, guhoraho, no kunguka. Ukoresheje tekinoroji ya kijyambere ya semiconductor hamwe nuburyo bukwiye bwa semiconductor isukura uburyo bwo kwangiza, fabs irashobora kugera kubwihanganirane busabwa kugirango ikore chip-generation.

Mugukurikiza uburyo bwuzuye, bwubwenge, hamwe nogukoresha ingufu za semiconductor sisitemu yo kugenzura ubuhehere, uba wishyize mumwanya wo kuzuza ibisabwa byiyongera kumasoko kuva kuri AI na IoT kugeza kumodoka no mu kirere. Mw'isi aho micron imwe ari ingenzi, ibidukikije urema ni ngombwa cyane.